Just started the 8.16.0 build 9638 and it fired up without a problem. Upgraded an application from 8.15, started it and debugging went fine too. Same with a newly created app.
Your description implies that you have this problem with any application. Is that so?
this problem only occured when deploying one specific application. Good to see that both upgrading and debugging works fine. I now reinstalled 8.16.0 build 9638 and solved the problem, assuming there was something going on during the installation on my machine.